The Performance of Humidity Sensor using Iron Oxide as The Sensor Element

Abstract

In this research, we study the material properties and performance of humidity sensor using iron oxide $(\alpha-\mathrm{Fe}_{2}\mathrm{O}_{3})$ as the sensor element and its performance of water vapor detection upon different level of humidity. We developed a humidity sensor from a synthesized iron oxide nanorod arrays through a solution synthesis-based method which is a combination of sonication and immersion techniques. The materials used in the synthesis were iron chloride FeCl 3 $\cdot$ 6H 2 O as a precursor, urea NH 2 -CONH 2 as a stabilizer and DI water as solvent. Humidity sensor performance was characterized in different humidity conditions from 40% to 90% RH. Analyses of sensor performance were done to understand the mechanism of water vapor detection. Besides showing good properties of structural and optical, the fabricated sensor device also exhibited an excellent sensor response with high sensitivity and stability, which improved the current available humidity sensor.