Abstract
It is a challenge to solve the performance regeneration and reuse of humidity sensor. This paper presents a new strategy to effectively solve the performance regeneration of humidity sensors. A humidity sensor featuring high sensitivity and fast response is obtained by adsorption of the bipyridyl ruthenium molecule (N3) on the TiO2 film on the surface of interdigital electrode (IDE) to form a humidity-enhanced sensing material. At 11% to 97% RH, the impedance value is changed by over 2 orders of magnitude, with a fast response time of 5 s and a recovery time of 8 s as well as relatively small hysteresis (2.09%). Meanwhile, through continuous multiple erase/re-sensing techniques, the humidity sensor performance is regenerated up to 30 cycles with no significant change in sensor performance. The humidity sensing mechanism of this sensor is investigated utilizing impedance spectroscopy, which reveals the unique humidity sensing mechanism of TiO2/N3 humidity sensor. Compared with general sensors, the biggest advantage of the humidity sensor designed in this paper is that it can regenerate the performance of the sensor and the idea and technology of this work can also be applied to other sensor fields.
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