Abstract
Nowadays, humidity sensors have caused the wide attention, owing to their use in various areas of daily life. In this study, a new organic-inorganic hybrid humidity sensor with high capacitance sensitivity and fast response was fabricated on substrates of glass and flexible polyethylene terephthalate (PET) by ion beam sputtering polydimethylsiloxane deposition. The sensors showed extremely high sensitivity (295.3 ± 0.8 pF/%RH), when the humidity changed from 11% to 97%, the capacitance at 1 kHz increased from 4.0 pF to 25.4 nF by more than 3.5 orders of magnitude. The sensors showed excellent performance, with high sensitivity, fast response of 4.9 s and long-term stability. After the humidity sensing mechanism of the sensors was investigated, it was found that the high sensitivity and the stability of A-SPSD films are originated from the formation of numerous hydrophilic functional groups on the stable C–Si–O network. Therefore, the present study describes an excellent technique for creating high-performance humidity sensors by sputtering polydimethylsiloxane deposition on the substrate, and it offers a practical path for creating humidity and gas sensors.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
