Abstract
High quality undoped metal-organic vapour phase epitaxial (MOVPE) GaSb layers have been grown on GaAs using the trimethylantimony/triethylgallium (TMSb/TEGa) precursor combination at 550°C and atmospheric pressure. The effects of the TMSb to TEGa flux ratio (i.e. V/III ratio) on the surface morphology and optical and transport properties of these layers have been investigated. The transport properties were found to be comparable to the best reported for un-doped GaSb grown using the same precursors at low reactor pressures. Two models (using either two monovalent acceptors or one divalent acceptor) were used to estimate the density of native acceptors and the ionization energy of the acceptors in GaSb. These models showed the shallow acceptor activation energy or first ionization energy to be ∼30 meV (falling within the reported range of 20–40 meV). The ionization energy of the deeper acceptor or second ionization of the level was determined to be ∼120 meV.
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