Abstract
The minimum specific ON-resistance $\text{R}_{ \mathrm{\scriptscriptstyle ON},\textsf {sp}}$ of the semisuperjunction (semi-SJ) device is realized in this paper. Based on the similar SJ optimization method in our previous works, the minimum $\text{R}_{ \mathrm{\scriptscriptstyle ON},\textsf {sp}}$ of the semi-SJ is searched by optimizing both the semi-SJ and the N-buffer regions. The proposed design formulas give the optimized doping concentration $\text{N}_{\textsf {SJ}}$ of the semi-SJ region, doping concentration $\text{N}_{\textsf {B}}$ , and length $\text{L}_{\textsf {B}}$ of the N-buffer region, respectively. As examples, 1000- and 1500-V semi-SJ devices are designed with the formulas. The calculated results are in a good agreement with the simulations. The comparisons between the simulations and the existing experiments demonstrate that the optimization in this paper realizes lower $\text{R}_{ \mathrm{\scriptscriptstyle ON},\textsf {sp}}$ under the same breakdown voltage $\text{V}_{\textsf {B}}$ even with a shorter SJ length.
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