Optimization of Lateral Superjunction Based on the Minimum Specific ON-Resistance

Abstract

The optimization methodology of the minimum specific ON-resistance $R_{\mathrm{\scriptscriptstyle ON},\textrm {min}}$ for the lateral superjunction device is proposed based on the concepts of charge and potential electric fields in this paper. From the $R_{\mathrm{\scriptscriptstyle ON},\textrm {min}}$ method, a new relationship between $R_{\mathrm{\scriptscriptstyle ON}}$ and breakdown voltage $V_{B}$ is developed, and the analytical formulas are obtained to directly give the doping concentration $N$ and the drift length $L_{d}$ . The calculated results, including the 800 and 1600 V examples, are in good agreement with the simulations. The optimized designs are also compared with the existing experimental and simulated data. It is shown that $R_{\mathrm{\scriptscriptstyle ON}}$ from the proposed optimization method is minimum, and the methodology of $R_{\mathrm{\scriptscriptstyle ON},\textrm {min}}$ is universal.