Abstract
A recently developed computational method has been used to calculate X-ray double crystal rocking curves from hetero-epitaxial layers. The importance of quantitative interpretation of diffraction data is demonstrated. 004 CuKα 1 rocking curves from (Ga, In)(As, P) layers on (001)InP substrates have been calculated. These have been compared with experimental curves wherever possible. The calculated curves for graded and multilayer structures usually have a number of maxima which do not equate to the number of layers involved. In these circumtances the frequent practice of considering the angular scale of the rocking curve to be equivalent to a reciprocal d spacing scale is clearly inappropriate.
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