Abstract
In the present work, the structure characteristics on InGaAs-GaAs/GaAs strained-layer superlattice (SLS) samples have been studied by measuring x-ray double crystal rocking curve in the non-paralle (+.-) setting and photoluminescence (PL), respectively. Using x-ray kinematical theory, we have calculated structure parameters of SLS and discussed the influence of different substrates. Computer simulation of experimental curve have been performed with kinematical diffraction theory. The experimental and simulated curves are basically identical. Reliability of calculated results using x-ray double rocking curve is further confined by PL.
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