Abstract
Experimental X-ray double crystal diffraction rocking curves for different InGaAs/GaAs superlattices grown by molecular beam epitaxy (MBE) and metal-organic chemical vapour deposition (MOCVD) are used to obtain theoretically calculated rocking curves, based on Takagi's theory of dynamic X-ray diffraction of distorted crystal. A detailed assessment and accurate information about these superlattice structures are possible by a comparison of the experimental and theoretical curves. A comparison is also made between theoretical rocking curves obtained by dynamic and kinematical approaches.
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