Abstract
The composition gradient in an InAlAs epitaxial layer on InP (0 0 1) substrate has been investigated using an X-ray double-crystal diffraction technique and a computer simulation method. Good agreement has been obtained between theoretical and experimental rocking curves when the correct graded layers are assumed in the samples. The results show that the graded layer introduces very sensitive asymmetric changes in layer peak and interference fringes. The intensities of the interference increase more strongly on the higher or lower angle side, while they are reduced on the other side, and the layer peak shifts to the higher or lower angle direction according to the positive or negative gradient. In all cases, however, the angle separations of the interference fringes do not change if the total thickness of the epilayer is unchanged.
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