Abstract
Theoretical C- V curves have been computed for substrate impurity concentrations which drop exponentially to a constant background level on receding from the surface. It is shown that for certain impurity profiles the C- V curves appear similar to those which would be obtained from a uniformly doped substrate with a large surface state density. It is evident therefore that some ambiguity may exist in the interpretation of experimental C- V curves if there is a marked departure from uniformity in the substrate doping level near the surface.
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