Abstract
The design and the construction of a pyrolysis mass spectrometer suitable for monitoring metal-organic chemical vapour deposition reactions is reported. The CeO 2-catalysed decompositions of Hacac (where acac denotes acetylacetone), Hdpm (where dpm denotes dipivaloylmethane), Ce(acac) 4 and Ce(dpm) 4 were investigated using this apparatus. The temperature dependence and the inhibition of the catalytic surface (1000–3000 Å of CeO 2) were also studied.
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