Abstract
Double-sided epitaxial YBa2Cu3O7-δ (YBCO) films with different copper (Cu) contents were grown on (100) LaAlO3 substrates using a hot-wall type metal organic chemical vapor deposition (MOCVD) apparatus. We investigated the relationship between Cu composition ratio of YBCO films and superconducting properties. Some precipitates were observed on the surface of the film and gradually became large as the Cu composition ratio increased. Despite the precipitation phenomenon, these YBCO films exhibited excellent superconducting properties at Cu composition ratios ranging from 2.5 to 4.0. The possibility of using the films for microwave application is also discussed.
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