Abstract
By means of Monte-Carlo calculation the effect of elastic photoelectron scattering on angular resolved X-ray photoelectron spectroscopy (ARXPS) data has been established. A method which accounts for this effect while restoring concentration profiles from ARXPS data has been proposed. A number of model examples showing that elastic scattering leads to about a 20% decrease of the effective photoelectron mean free paths in a solid sample have been considered.
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