Abstract
Sodium niobate thin films doped with manganese (NN), and NN films modified with 5 or 10 mol % calcium zirconate (CZ) on platinized silicon substrates were prepared by chemical solution deposition. The 250-nm-thick films crystallize in a perovskite phase with fine, equiaxed grains. The NN films exhibit well-shaped ferroelectric loops with a remanent polarization and coercive field of ∼10 μC/cm2 and ∼100 kV/cm, respectively. The modification with CZ strongly influences the ferroelectric response of the films: the remanent polarization progressively decreases to around 2.5 μC/cm2. The absence of an anti-ferroelectric response, which has previously been confirmed in bulk NN-CZ ceramics, is attributed to the nanoscale microstructure and residual thermal stresses. All the studied films exhibit a piezoelectric response with the highest piezoelectric d33 coefficient of 35 pm/V at 300 kV/cm bias field for the NN modified films with 5 mol % CZ, making them candidates for lead-free piezoelectric thin-film applications.
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