Abstract
A series of soft magnetic granular FeCoSiO films is fabricated using radio frequency magnetron sputtering under pure argon ambient conditions. The magnetic, high-frequency, and microwave noise suppression characteristics of these thin films are studied in detail. By using microwave probe station, integrated-type electromagnetic noise suppressors based on a coplanar waveguide transmission line and incorporated with a SiO2 dielectric and a granular FeCoSiO magnetic thin film with excellent high frequency and soft magnetic properties are investigated. The relationship between transmission properties of electromagnetic noise suppressors and magnetic characteristics of FeCoSiO magnetic thin films were studied. The experimental values of the loss peak frequencies agree well with the calculated ferromagnetic resonant frequency, which considers the demagnetizing field. The results indicate that the main loss mechanism of the integrated devices is the ferromagnetic resonance, but not the L–C resonance. The FeCoSiO magnetic films are considered to be promising as ideal candidate materials for electromagnetic noise suppressor.
Published Version
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