The crystal morphology effect of Iridium tris-acetylacetonate on MOCVD iridium coatings

Abstract

Iridium tris-acetylacetonate is the most commonly used precursor for the metal organic chemical vapour deposition (MOCVD) of iridium coating. In this paper, the crystal morphology effect of iridium tris-acetylacetonate on iridium coatings prepared by MOCVD was studied. Two kinds of Ir(acac)3 crystalline powder were prepared. A precursor sublimation experiment in a fixed bed reactor and an iridium deposition experiment in a cold-wall atmospheric CVD reactor were designed. It is found that the volatility of the hexagonal columnar crystals is better than that of the tetragonal flake crystals under the experimental conditions. It’s due to the hexagonal columnar crystals exposed more crystal faces than the tetragonal flake crystals, increasing its contact area with the transport gas. An adequate supply of iridium tris-acetylacetonate during the pre-deposition period contributed to obtain an iridium coating with a smooth and uniform continuity surface.