Abstract
The pyroelectric infrared (PIR) sensor with a calcium-modified lead titanate Pb(subscript 1-x)Ca(subscript x)TiO3 thin film with x=0.3 [PCT(30)] thin film have been successfully fabricated. A RF planar magnetron sputter was used to deposit PCT(30) thin film. A perovskite thin film can be obtained. From the properties measurement we can obtain the remanent polarization Pr=25.3 μc/cm^2 and coercive electric field Ec=52.65 KV/cm. The pyroelectric coefficient was measured as a function of temperature which was 4.13×10^(-4)C/m^2 K at 300 degree C. For the PIR performance measurement, the voltage response of the single PIR sensor is 723.5 VW^(-1) and the specific detectivity is 8.28×10^6 cmW^(-1) at 0.3 Hz. In addition, a 2-D 8×8 element PIR sensor array is finished with fabricated PIR sensors.
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