Abstract
The pyroelectric infrared (PIR) sensor with the lead-titanate (PbTiO3) thin film has been successfully fabricated. A RF planar magnetron sputter was used to deposit PbTiO3 thin film. A perovskite thin film can be obtained. From the properties measurement we can obtain the remanent polarization Pr=20.8μc/cm^2 and coercive electric field Ec=79.365 kV/cm. The pyroelectric coefficient of 1.09×10^(-5) C/m^2 K at 50℃ was measured as a function of temperature. In addition, the fabricated PIR sensor properties is RV=600 (VW^(-1)) when chopper frequency is 0.3 Hz. D*=7.3×10^5 cm Hz(superscript 1/2) W^(-1) for a modulation frequency of 0.5 Hz. In this experiment, the 4×4 array for PIR sensor is also constructed and tested.
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