Abstract
Many researchers have studied the miniaturization of the hemisphere resonator gyroscope for decades. The hemisphere resonator (HSR), as the core component, has a size that has been reduced to the submillimeter level. We developed a method of batch production of micro-hemisphere shell resonators based on a glass-blowing process to obtain larger hemisphere shells with a higher ratio of height to diameter (H/D), we introduced the chemical foaming process (CFP) and acquired an optimized hemisphere shell; the contrasted and improved H/D of the hemisphere shell are 0.61 and 0.80, respectively. Finally, we increased the volume of glass shell resonator by 51.48 times while decreasing the four-node wineglass resonant frequencies from 7.24 MHz to 0.98 MHz. The larger HSR with greater surface area is helpful for setting larger surrounding drive and sense capacitive electrodes, thereby enhancing the sensitivity of HSR to the rotation. This CFP method not only provides more convenience to control the shape of a hemisphere shell but also reduces non-negligible cost in the fabrication process. In addition, this method may inspire some other research fields, e.g., microfluidics, chemical analysis, and wafer level package (WLP).
Highlights
The hemisphere resonator gyroscope (HRG), as one type of Coriolis gyro, has superior navigation precision because of its unique axisymmetric 3D structure [1]
The Q factor of the hemisphere resonator (HSR) mainly depends on thermoelastic damping and anchor losses, studies of the detailed energy loss mechanisms were presented in [7,8]
A low thermoelastic damping structural material can achieve a high Q factor; for example, an HSR fabricated by microcrystalline diamond was found to have a four-node wineglass resonant frequency of 18.321 kHz, with the observed Q of ~10,000 at the four-node wineglass mode and 20,000 at six-node vibration mode [9]
Summary
The hemisphere resonator gyroscope (HRG), as one type of Coriolis gyro, has superior navigation precision because of its unique axisymmetric 3D structure [1]. A low thermoelastic damping structural material can achieve a high Q factor; for example, an HSR fabricated by microcrystalline diamond was found to have a four-node wineglass resonant frequency of 18.321 kHz, with the observed Q of ~10,000 at the four-node wineglass mode and 20,000 at six-node vibration mode [9]. A stem-supported hemispherical shell with self-aligned tall capacitive electrodes was fabricated in polysilicon; the shell has a wineglass resonant mode at 5.58 kHz with a Q of 17,600 [10]. Other materials, such as fused silica [11] and Pyrex have been used to fabricate an HSR [2]. The ideal drive axis and sense axis of a gyroscope should
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