Abstract
This paper reports, for the first time, a 3D digital reconstruction method for geometric characterization of fused silica microshell resonators. Three-dimensional digital geometric information of fused silica microshell resonators prepared by a chemical foaming process is acquired by X-ray microscope. The surface points of the microshell are selected by pixel contrast to reconstruct the 3D geometric model. The 4th harmonics distribution of spatial radius and thickness at different shell heights are successfully calculated with the reconstruction model. The finite element method based on the reconstruction model is also established to analyze the resonant frequency and frequency split of the wineglass mode. Results show that the relative 4th radius harmonic decreases with the height increase, indicating that the chemical foaming process has the capability to restrain the asymmetry for fused silica micro shell resonators. Besides, the wineglass frequency difference between the digital reconstruction model and the experiment is within 3%. The frequency splits from the digital model also correspond well with the experiments. This work provides new insights in 3D shell information, and may enable manufacturing precision improvement of 3D microshell resonators.
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