The application of C/Sb composite multilayer films on fast flexible phase change memory

Abstract

In this paper, the phase transformation properties of C/Sb composite multilayer films based on flexible substrates were studied. After different times of bending, the flexible films can still achieve amorphous to crystalline phase transition, but the crystalline resistance increases to different degrees. When the bending times are less than 15000 times, the deformation makes the grain fine, the surface of the film tends to be flat, the surface electric field effect is weakened, and the resistance drift is reduced. When the bending times are higher than 15000 times, cracks begin to appear in the film, and the cracks’ depth and width increase with the bending times. The distribution of C and Sb elements at the crack was analyzed by scanning electronic microscope energy spectrum. The phase change memory device of C/Sb composite multilayer film based on flexible PEEK substrate has been made, and the rapid reversible resistance transition (∼10 ns) in various complex states has been successfully achieved. This research provides a new idea for flexible information storage.