Temperature dependent carrier lifetime studies of Mo in crystalline silicon

Abstract

The capture cross sections of both electrons σn and holes σp were determined for interstitial molybdenum in crystalline silicon over the temperature range of −110 to 150 °C. Carrier lifetime measurements were performed on molybdenum-contaminated silicon using a temperature controlled photoconductance instrument. Injection dependent lifetime spectroscopy was applied at each temperature to calculate σp and σn. This analysis involved a novel approach that independently determined the capture cross sections at each temperature assuming a known defect density and thermal velocity. Since the energy state is in the lower half of the bandgap, the determination of σp is unaffected by the defect energy at all temperatures, and σp is found to decrease with temperature in a fashion consistent with excitonic Auger capture. At temperatures below 0 °C, the determination of σn is also unaffected by the defect energy due to the suppression of thermal emission, and σn decreases with temperature as well. It is shown that a projection of σn to higher temperature suggests the defect has an energy of 0.375 eV above the valance band edge of silicon.