Temperature dependences of channel mobility and threshold voltage in 4H- and 6H-SiC MOSFETs

Abstract

ABSTRACTWe have investigated the effect of polytype and oxidation condition on the temperature dependence of channel mobility and threshold voltage in 4H- and 6H-SiC MOSFETs. The behaviors of the channel mobility are apparently different for 4H- and 6H-SiC MOSFETs. In contrast to the polytype effect, dry and wet oxidation samples have almost similar channel mobilities. The variation of the threshold voltage with temperature is proportional to the number of the interface states near the conduction band extracted from n-type MOS capacitors. Therefore, we argue that the distribution of the interface states near the conduction band in p-type SiC MOS structure can be represented by that in n-type SiC MOS structure. Although the oxidation condition varies the distribution of the interface states in the energy range between 0.2 and 0.4 eV from the conduction band, it has little influence on the channel mobility.