Abstract
The trapping properties of thin oxide layers during Fowler-Nordheim electron injection have been investigated as a function of temperature in the range 258–423 K. It is found that the bulk oxide trapped charge at breakdown is almost temperature independent, whereas the charge to breakdown varies by more than one order of magnitude. Therefore the bulk oxide trapped charge at breakdown appears as being the key wear out parameter which describes in a better way the oxide quality than the usual charge to breakdown. In addition, the activation energy of the charge to breakdown (around 0.14 eV) and that of the trapping efficiency (around 0.05 eV) have been quantitatively correlated through a generic degradation power law which governs the charge build-up mechanism in the bulk of the oxide layer during Fowler-Nordheim electron injection.
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