Abstract
We report on the different behaviours of interface trap generation caused by Fowler-Nordheim (F-N) electron injection and by hot-hole injection using the direct current current-voltage (DCIV) method. The hole-electron ratio of the gate current under hot-hole injection conditions is quantified. The study shows that the efficiency of hole-induced interface trap generation is about 150 times that of electron-induced interface trap generation. Furthermore, interface trap generation by both hole and electron injections obey a power-law relation with injected fluence. The hot-hole injection is observed to have a smaller power exponent than F-N electron injection.
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