Abstract
Multi-walled carbon nanotube (MWCNT) bridges, grown using low-pressure metal-catalyzed chemical vapor deposition technique between silicon posts, were used as tiny piezoresistors to monitor vibration and bending/deformation of silicon cantilever beams. The weld strength of CNTs measured using atomic force microscope was larger than 100 nN/CNT and their full-scale resistance change was larger than 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup> Omega.The effective longitudinal piezoresistivity of these CNTs was larger than 4 times 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-8</sup> Pa <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> which is larger than that of Pi <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">44</sub> in silicon.
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