Abstract
Multi-walled carbon nanotube (MWCNT) bridges, grown using low- pressure metal-catalyzed chemical vapor deposition technique between silicon posts, were used as tiny piezoresistors to monitor vibration and bending/deformation of silicon cantilever beams. The weld strength of CNTs measured using atomic force microscope was larger than 100 nN/CNT and their full-scale resistance change was larger than 1e5 Ohm.The effective longitudinal piezoresistivity of these CNTs was larger than 4x1e-8 1/Pa which is larger than that of Pi44 in silicon.
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