Abstract
Technology for Forming Contacts from Refractory Metals to Doped Semiconductor Layers
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https://doi.org/10.17587/nmst.26.184-187
Copy DOIJournal: Nano- i Mikrosistemnaya Tehnika | Publication Date: Aug 22, 2024 |
Technology for Forming Contacts from Refractory Metals to Doped Semiconductor Layers
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