Abstract
Abstract While microelectro-mechanical (MEMS) resonators are increasingly being considered in biochemical sensing applications, the complexity of the system results in a need for a system level optimization in which the readout circuit and the MEMS components should carefully be co-optimized. Here, we present systematic optimization approach that highlights the trade-offs between the MEMS resonator and the accompanying oscillator-based integrated readout circuit. A system figure of merit is formulated to account for resonator modal frequency, equivalent electrical characteristics, sensitivity, readout circuit bandwidth, frequency resolution and power consumption. While the methodology can be adapted to study of various MEMS-based resonators coupled to oscillator-based readouts, for clarity, we analyze here the specific case of polymer-coated piezoelectric microbridge resonators sensitive to volatile organic compounds.
Published Version
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