Synthesis of ZrO2 nanoparticles using reactive magnetron sputtering and their structural, morphological and thermal studies

Abstract

Intensive and extensive research is focused on the synthesis of ZrO2 nanoparticles being used in different applications such as photocatalysis, sensors, coatings and wastewater treatment. In the present work, we report the synthesis of ZrO2 nanoparticles using novel reactive magnetron sputtering technique and then investigated the sputtering power (40, 60, 80 and 100 W) effect on structural, morphological and thermal properties. The characterizations of the synthesized nanoparticles were carried using powder X-ray diffraction (XRD), Raman spectroscopy, Fourier transform infrared spectroscopy (FT-IR), Field emission scanning electron microscopy (FE-SEM), Energy dispersive X-ray analysis (EDXA), Transmission electron microscopy (TEM), Selected area electron diffraction (SAED) and Thermogravimetry analysis (TGA). XRD analysis confirmed the formation of pure tetragonal phase with an increase in average crystallite size as a function of sputtering power. EDXA and Raman analysis also confirmed the formation of high purity tetragonal phase. FE-SEM and TEM results displayed spherical type morphology in aggregated form having a particle size less than 10 nm. TGA results indicated that the weight loss was only due to desorption of water molecules and is inversely proportional to the particle size.