Abstract
In order to examine the possibility of the synthesis of an intermetallic compound thin film by intense, pulsed, ion beam evaporation (IBE), the synthesis of thin films of Ti–Al system intermetallic compound was attempted. The crystal structure and composition of the films were evaluated. By using a combination target of Ti and Al, thin films of single phase could not be synthesized, while the Ti3Al film was found to be successfully synthesized by using a Ti/Al sintered target. The Ti3Al film was orientated in the 002 plane.
Published Version
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