Synthesis of anode active material particles for lithium-ion batteries by surface modification via chemical vapor deposition and their electrochemical characteristics

Abstract

The high capacity and optimal cycle characteristics of silicon render it essential in lithium-ion batteries. We have attempted to realize a composite material by coating individual silicon (Si) particles of μm-order diameter with a silicon oxide film to serve as an active material in the anode of a lithium-ion battery and thus improve its charge-discharge characteristics. The particles were coated using an inductively coupled plasma-chemical vapor deposition (ICP-CVD) process that realized a homogeneously coated silicon oxide film on each Si particle. The film was synthesized using tetraethyl orthosilicate (TEOS) with hydrogen (H2) gas used as a reducing agent to deoxidize the silicon dioxide. This enabled the control of the silicon oxidation number in the layers produced by adjusting the H2 flow during the silicon oxide deposition by ICP-CVD. The silicon oxide covering the Si particles included both silicon monoxide and suboxide, which served to improve the charge-discharge characteristics. We succeeded in realizing an active material using Si, which is abundant in nature, for the anode of a lithium-ion battery with highly charged, improved cycle properties.