Abstract
This study examined the structural properties of ZnO nanorods grown on Ti-buffer layers with different surface roughnesses of 1.5 and 4.0 nm. Vertically aligned ZnO nanorods were synthesized on Al 2O 3 substrates with a Ti-buffer layer by metal-organic chemical vapor deposition. X-ray diffraction revealed the ZnO nanorods grown on a smooth surface to have higher quality and better alignment in the ab-plane than those grown on the rough surface. Field-emission transmission electron microscopy (FE-TEM) measurements revealed a disordered layer at the ZnO/Ti interface. FE-TEM demonstrated that the Ti-buffer layer contained a mixture of ordered and amorphous phases. Energy dispersive spectroscopy (EDS) analysis revealed the Ti-buffer layers to be entirely oxides.
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