Abstract
Poly(4‐t‐butoxycarbonyloxystyrene‐sulfone) was synthesized by a thermally induced radical copolymerization of 4‐t‐butoxycarbonyloxystyrene and sulfur dioxide using AIBN as the initiator. The effect of polymerization conditions such as temperature, monomer feed ratio, and monomer concentration on the copolymer molecular weight and composition was studied. Additionally, the lithographic performance of the matrix polymer was evaluated for various copolymer compositions and molecular weights.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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