Abstract
Non-equilibrium electron beam plasma (EBP) was proved to be promising for surface modification of materials, synthesis of protective coatings, and film deposition at sufficiently high plasma pressures (up to 50 Torr). The optimal EBP parameters were selected to produce active plasma particles in desired concentrations and to heat the surface to the required temperature. Synthesis of nitride, carbide oxide and boride surface layers, carbon and ceramics deposition on polymers at low substrate temperatures, powder treatment in both the dusty EBP and the dust-plasma crystals were studied.
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