Abstract
A surface modification process on the contact lens using a nonequilibrium atmospheric pressure remote plasma excited by three-phase AC power source has been investigated. Two dimensional spatial distributions of optical emissions of Ar and OH were measured, and gas temperature and electron density were estimated using the optical emission spectroscopy. It has been found that the gas temperature in the upstream region of the remote plasma is lower than that in the downstream region due to the interfusion of ambient air. The heat-sensitive material such as plastic could be processed without thermal damage by the nonequilibrium atmospheric pressure remote plasma in the proper low-temperature region.
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