Abstract
ABSTRACTThis paper describes the use of Optical Emission Spectroscopy (OES) to measure electron densities and temperatures in non-equilibrium plasmas. The ways to interpret relative line-intensities of neutral argon atoms are evaluated based upon a collisional-radiative model including atomic collisional processes. A conversion from an excitation temperature determined from relative line intensities assuming a Boltzmann population distribution to the thermal electron temperature in the electron temperature range 1–4 eV and electron density range 1010–1012 cm–3 is given. Procedures to obtain electron temperature Te and density Ne of non-equilibrium argon plasma by OES measurement with collisional radiative model.
Highlights
This paper describes the use of Optical Emission Spectroscopy (OES) to measure electron densities and temperatures in nonequilibrium plasmas
The findings at the present time have been stated on the OES measurement of non-equilibrium argon discharge plasma, as an application of the CR model, for the determination of the electron temperature and density from the number densities in non-local thermodynamic equilibrium (LTE) state
The CR model was explained in terms of excitation kinetics in the plasmas, which describes the excited-state number densities of any non-LTE state as functions of the electron temperature, density and the ground-state neutral atom
Summary
Reactive plasmas are generated stably and continuously when electric power is supplied to rarefied rare gas, typically argon, with some amount of reactive gases. When the electron temperature and density are determined from the CR model, the methodology to apply the CR model must be physically developed from the number densities of the excited states that must be observed in the OES measurement, which become input parameters of this application. The OES line-intensity measurement assisted with the CR model is being applied to understand the electron temperature of atmospheric-pressure discharge argon-based plasmas for various applications of material applications [51–55], energy applications [56–58], or aeronautical applications [59]. This should be discussed in a different article in the future, since the physics to interpret the radiation data is completely different
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