Abstract
Fluorozirconate glass with the composition of 53ZrF4 20BaF2 4LaF3 3AlF3 20NaF (ZBLAN) was implanted with 5, 10 and 15 keV nitrogen ions to the doses of 2 × 1017 and 5 × 1017 ions/cm2. Optical transmission and electrical resistivity of implanted glasses are strongly dependent on implantation energies. The implanted glass surface showed good resistance to water corrosion. Characterizations by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) indicated that the surface compositional modifications were fluorine depletion, metallic Zr precipitation and nitride layer formation beneath the outermost glass surface. The nitride layers are responsible for excellent water resistance of the implanted glass surface.
Published Version
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