Abstract
An x-ray microtomography method combined with hard x-ray imaging microscopy was developed that has a potential spatial resolution of the order of 10–100 nm. The system consists of a high-brilliance undulator source of SPring-8, a beam diffuser plate to reduce the coherence of the illumination, a high-precision rotating sample stage, a Fresnel zone plate objective, and a high-resolution x-ray imaging detector. The three-dimensional images of several samples were observed and successfully reconstructed with a pitch pattern of 0.6 μm.
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