Study the Effect of Pd Sensitization on Hydrogen and Methane Sensing Performances of Sol-Gel Grown Nano WO3/SiO2/Si Sensor

Abstract

The sensing performance of Pd sensitized WO 3 thin film gas sensor has been studied towards hydrogen and methane gases with different concentrations (0.1%, 0.5%, 1%) at the optimum operating temperatures. The Pd surface sensitized Tungsten trioxide (WO 3 ) thin film sensor has been prepared on SiO 2 /Si substrate by sol-gel deposition technique. The material properties of the thin film sensor have been analyzed by two different techniques (X-ray diffraction (XRD) and Scanning Electron Microscopy (SEM)). The Stability of Pd surface sensitized WO 3 thin film hydrogen sensor have also been studied. The Pd surface sensitized WO 3 hydrogen sensor presents better results in terms of operating temperature, response magnitude compared to Pd surface sensitized WO 3 thin film-based methane senso