Study on the Lateral Piezoelectric Actuator with Actuation Range Amplifying Structure

Abstract

A novel piezoelectric micro-actuator with actuating range amplification structure has been proposed. This actuator is unique in that the leverage type amplification structure enables large actuating movement with low voltage. In case of general piezoelectric thin film actuator, applied voltage is low and almost zero power is consumed. Its switching time is very fast in comparison with electrostatic actuators and thermal actuators. However, the most drawback of piezoelectric actuator is short actuating range. A 100μm length PZT actuator can only make movement of 100. In this research, we suggest an actuator which can provide geometric amplification of the PZT strain displacement in lateral direction. The lateral piezoelectric MEMS actuator was fabricated and its actuating range was measured. The actuator shows maximum lateral displacement of 1.1μm, and break-down-voltage of the thin film PZT actuator is above 16V.