Secondary resonances of a microresonator under AC-DC electrostatic and DC piezoelectric actuations

Abstract

This article studies the secondary resonances of a clamped-clamped microresonator under combined electrostatic and piezoelectric actuations. The electrostatic actuation is induced by applying the AC-DC voltage between the microbeam and the electrode plate that lies at the opposite side of the microbeam. The piezoelectric actuation is induced by applying the DC voltage between upper and lower sides of piezoelectric layer. It is assumed that the neutral axis of bending is stretched when the microbeam is deflected. The drift effect of piezoelectric layer (the phenomenon where there is a slow increase of the free strain after the application of a DC field) is neglected. The equations of motion are solved by using the multiple scale perturbation method. The system possesses a subharmonic resonance of order one-half and a superharmonic resonance of order two. It is shown that using the DC piezoelectric actuation, the sensitivity of AC-DC electrostatically actuated microresonator under subharmonic and superharmonic resonances may be tuned. In addition, it is shown that the tuning domain of the microbeam under combined electrostatic and piezoelectric actuations at subharmonic and superharmonic conditions is larger than the tuning domain of microbeam under only the electrostatic actuation.