Study on Phase Measurement Profilometry with Optical Fiber Projection Grating

Abstract

This article proposed a way to reduce the error in the measurement of object morphology that based on the phase measurement profilometry with Optical Fiber Projection Grating. Some simulation of the actual light intensity distribution need to do first to get the error that caused by the aperiodic fringes, express the errors by phase. After that, compensate for this error based on the actual measurement results. There is a larger improvement in the accuracy of the recovery after the process proposed in this article than before through the simulation. The experiment verifies the correctness of this method through the measurement of given standard parts.