Phase measurement profilometry based on a virtual reference plane method

Abstract

In Phase Measurement Profilometry(PMP), the setting of the reference plane plays an important role. It is a critical step to capture the grating fringe projected onto the reference plane in PMP. However, it is sometimes difficult to choose and place the reference plane in practical applications. In this paper, a virtual reference plane is introduced into PMP, with which 3D measurement can be realized without using the physical reference plane. The virtual reference plane is generated through extracting a partial area of the deformed fringe image that corresponds to a planar region and employing the interpolation algorithm. The method is proved theoretically through simulation experiments, providing a new suggestion for actual measurement by PMP.