Dual-frequency grating method based research on phase measurement profilometry (PMP) technology

Abstract

With more than three decades of development, three-dimensional optical measurement technology has reached a mature stage in commercial applications, meanwhile new ones have continually arisen. Due to the development of Charge Coupled Device (CCD) array camera and digital projection technology, the applications of Phase Measurement Profilometry (PMP) become more and more broad. Among these, dual-frequency grating method has drawn many attentions because of its simplicity in principle and optical path, low requirement of equipment, high accuracy and level of automation comparing with other methods. The phase calculation is one of the key technologies in PMP. However, phase unwrapping algorithm in PMP is a difficult issue. A lot of new algorithm have been proposed, but neither one can solve all the problems, so how to set up new phase unwrapping algorithm becomes urgent. In this chapter, we systematically investigate the phase unwrapping method in dual-frequency grating method, and experimentally set up the system. To verify our method, we experimentally measure a three dimensional object which possesses complicated stair shapes on its surface. The results show that our dual-frequency grating method could achieve phase unwrapping without doing conventional phase unwrapping calculations, and it could also detect the detailed stair shapes on the surface of this three dimensional object automatically.