Abstract
Method for grinding by adding rubber pad between LED sapphire substrate and ceramic supporting is proposed though the ANSYS finite element analysis, which obtains high flatness of the surface of a substrate efficiently. The experimental results also confirmed that after grinding the 2-inch sapphire substrate in the cushion, the total thickness of the error (TTV) <4 microns and the BOW <3 microns. Therefore, the upholstered film is one of the efficient, economic and highly automated ways to grind sapphire substrate.
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