Abstract
Feasibility of polycrystalline silicon (poly-Si) films deposited by catalytic CVD (cat-CVD) method as a solar cell material is studied. The poly-Si films are obtained at 300°C by catalytic cracking reactions of a gaseous mixture of SiH 4 and H 2 on a heated tungsten (W) wire. Present poly-Si films consist of both amorphous and polycrystalline phases. The mixing ratio of amorphous to poycrystalline phases can be controlled by deposition conditions. Because of both large optical absorption and relatively large mobility of carrier transport, a cat-CVD poly-Si film is feasible candidate for solar cell material.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.