Study on 6DOF Microvibration Testing Device Using Piezoelectric Actuators.

Abstract

Microvibration control is becoming more important in high-technology fields such as semiconductor manufacturing, and influence of microvibration on precision machines is increasing. However, microvibration sensitivities of these machines cannot be measured using conventional vibration testing devices. In this study, using an active 6DOF microvibration control system with piezoelectric actuators, feasibility of a microvibration simulator is discussed. A control method is proposed based on the model matching method, which achieves almost the desired frequency characteristics using only absolute acceleration. Experimental studies are conducted with satisfactory results in isolation performance against micro-ground motion, and servo performance for various reference inputs.