Study of Active Microvibration Control Device Using Piezoelectric Actuator. 1st Report, Fundamental Study of One-Dimensional Microvibration Control.

Abstract

Microvibration control is becoming more important in high-technology fields such as semiconductor manufacture. Active microvibration control systems are required to obtain more superior control performance to passive systems. In this study, an active system using a piezoelectric actuator was tested using test apparatus designed for one-dimensional horizontal vibration control. The control law was proposed to achieve almost the same performance as sky-hook systems which are realized by feedback of the absolute displacement and the absolute velocity of the isolation table, by feedback of the absolute acceleration alone. Vibration control experiments were carried out with satisfactory results in isolation performance against micro ground motion, damping performance against direct disturbance and robustness of the control system.